| IEEE-488 |
IEEE-488.1 compliant. Supports IEEE-488.2 common commands and status model topology |
| USB Control (Rear) |
USB 2.0 device, TMC488 protocol. |
| RS-232 |
Baud rates from 300 bps to 115200 bps. Programmable number of data bits, parity type, and flow control (RTS/CTS hardware or none). |
| Ethernet |
RJ-45 connector, LXI Class C, 10/100BT, no auto MDIX. |
| Expansion Interface |
The TSP-Link expansion interface allows TSP enabled instruments to trigger and communicate with each other. (Not available on 2634B.
Cable Type: Category 5e or higher LAN crossover cable.
Length: 3 meters maximum between each TSP enabled instrument |
| LXI Compliance |
LXI Class C 1.4 |
| LXI Timing |
Total Output Trigger Response Time |
245 μs min., 280 μs typ., (not specified) max |
| Receive LAN[0-7] Event Delay |
Unknown |
| Generate LAN[0-7] Event Delay |
Unknown |
| Digital I/O Interface |
Connector |
25-pin female D. |
| Input/Output Pins |
14 open drain I/O bits. |
| Absolute Maximum Input Voltage |
5.25 V |
| Absolute Minimum Input Voltage |
–0.25V |
| Maximum Logic Low Input Voltage |
0.7 V, +850 µA max |
| Minimum Logic High Input Voltage |
2.1V, +570µA |
| Maximum Source Current (flowing out of Digital I/O bit) |
+960µA |
| Maximum Sink Current @ Maximum Logic Low Voltage (0.7V) |
–5.0mA. |
| Absolute Maximum Sink Current (flowing into Digital I/O pin) |
–11 mA. |
| 5V Power Supply Pin |
Limited to 250 mA total for all three pins, solid state fuse protected |
| Safety Interlock Pin |
Active high input. >3.4 V @ 24 mA (absolute maximum of 6 V) must be externally applied to this pin to ensure 200 V operation. This signal is pulled down to chassis ground with a 10 kΩ resistor. 200 V operation will be blocked when the INTERLOCK signal is <0.4 V (absolute minimum –0.4 V). S |
| USB File system (front) |
USB 2.0 Host |
Mass storage class device |
| Power supply |
100V to 250VAC, 50–60Hz (auto sensing), 240VA max |
| Cooling |
Forced air. Side intake and rear exhaust. One side must be unobstructed when rack mounted |
| EMC |
Conforms to European Union Directive 2004/108/EEC, EN 61326-1 |
| Safety |
Conforms to European Union Directive 73/23/EEC, EN 61010-1, and UL 61010-1 |
| Dimensions |
89 mm high × 213 mm wide × 460 mm deep (3½ in × 83⁄8 in × 17½ in).
Bench Configuration (with handle and feet): 104mm high × 238mm wide × 460mm deep (41⁄8 in × 93⁄8 in × 17½ in). |
| Weight |
2635B |
4.75kg (10.4 lbs) |
| 2634B, 2636B |
5.50kg (12.0 lbs) |
| Environment: For indoor use only |
Altitude |
Maximum 2000 meters above sea level |
| Operating |
0°–50°C, 70% R.H. up to 35°C. Derate 3% R.H./°C, 35°–50°C |
| Storage |
–25°C to 65°C |
This document contains specifications and supplemental information for the 2634B, 2635B, and 2636B System SourceMeter® SMU instruments.
Specifications are the standards against which the 2634B, 2635B, and 2636B are tested. Upon leaving the factory, the 2634B, 2635B, and
2636B meet these specifications. Supplemental and typical values are non-warranted, apply at 23 °C, and are provided solely as useful
information.
Accuracy specifications are applicable for both normal and high capacitance modes.
The source and measurement accuracies are specified at the SourceMeter CHANNEL A (2634B, 2635B, and 2636B) or SourceMeter
CHANNEL B (2634B, 2636B) terminals under the following conditions:
- 23 °C ± 5 °C, <70% relative humidity
- After 2 hour warm-up
- Speed normal (1 NPLC)
- A/D auto-zero enabled
- Remote sense operation or properly zeroed local operation
- Calibration period = 1 year
|
| Voltage Programming Accuracy |
| 200 mV |
5 µV |
0.02% + 375 µV |
20 µV |
| 2 V |
50 µV |
0.02% + 600 µV |
50 µV |
| 20 V |
500 µV |
0.02% + 5 mV |
300 µV |
| 200 V |
5 mV |
0.02% + 50 mV |
2 mV |
| Temperature Coefficient (0°–18 °C and 28°–50 °C) |
±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode. |
| Maximum output power and source/sink limits |
30.3 W per channel maximum. ±20.2 V @ ±1.5 A, ±202 V @ ±100 mA, four quadrant source or sink operation |
| Voltage Regulation |
Line |
0.01% of range |
| Load |
±(0.01% of range + 100µV) |
| NOISE 10Hz–20MHz |
<27 mV peak-peak (typical), <3 mV RMS (typical), 20 V range. |
| Current Limit/Compliance |
Bipolar current limit (compliance) set with single value. Minimum value is 100 pA. Accuracy is the same as current source. |
| Overshoot |
<±(0.1% + 10 mV) typical. Step size = 10% to 90% of range, resistive load, maximum current limit/compliance. |
| Guard Offset Voltage |
<4 mV typical. Current <10 mA |
NOTES
1. Add 50 µV to source accuracy specifications per volt of HI lead drop.
2. High Capacitance Mode accuracy is applicable at 23 °C ±5 °C only.
3. Full power source operation regardless of load to 30 °C ambient. Above 30 °C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
4. For sink mode operation (quadrants II and IV), add 0.06% of limit range to the corresponding current limit accuracy specifications. Specifications apply with sink mode operation enabled. |
| Current Programming Accuracy |
| 1 nA |
20 fA |
0.15% + 2 pA |
800 fA |
| 10 nA |
200 fA |
0.15% + 5 pA |
2 pA |
| 100 nA |
2 pA |
0.06% + 50 pA |
5 pA |
| 1 µA |
20 pA |
0.03% + 700 pA |
27 pA |
| 10 µA |
200 pA |
0.03% + 5 nA |
62 pA |
| 100 µA |
2 nA |
0.03% + 60 nA |
3 nA |
| 1 mA |
20 nA |
0.03% + 300 nA |
6 nA |
| 10 mA |
200 nA |
0.03% + 6 µA |
240 nA |
| 100 mA |
2 µA |
0.03% + 30 µA |
614 nA |
| 1 A 1 |
20 µA |
0.05% + 1.8 mA |
70 µA |
| 1.5 A 1 |
50 µA |
0.06% + 4 mA |
150 µA |
| 10 A 1, 2 |
200 µA |
0.5 % + 40 mA (typical) |
|
| Temperature Coefficient (0°–18 °C and 28°–50 °C) |
±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode. |
| Maximum Output Power and Source/Sink Limits |
30.3 W per channel maximum. ±1.515 A @ ±20 V, ±101 mA @ ±200 V, four quadrant source or sink operation |
| Current regulation |
Line |
0.01% of range |
| Load |
±(0.01% of range + 100pA) |
| Voltage Limit/Compliance |
Bipolar voltage limit (compliance) set with a single value. Minimum value is 20 mV. Accuracy is the same as voltage source |
| Overshoot |
<±0.1% typical. Step size = 10% to 90% of range, resistive load; see Current Source Output Settling Time for additional test conditions). |
NOTES
1. Full power source operation regardless of load to 30 °C ambient. Above 30 °C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
2. 10 A range accessible only in pulse mode.
3. High Capacitance Mode accuracy is applicable at 23 °C ±5 °C only.
4. Full power source operation regardless of load to 30 °C ambient. Above 30 °C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
5. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to corresponding voltage source specification. For 200 mV range add an additional 120 mV of uncertainty |
| Additional Source Specifications |
| Transient Response Time |
<70 µs for the output to recover to within 0.1% for a 10% to 90% step change in load |
| Voltage Source Output Settling Time |
Time required to reach within 0.1% of final value after source level command is processed on a fixed range
200 mV Range: <50 μs (typical)
2 V Range: <50 μs (typical)
20 V Range: <130 μs (typical)
200 V Range: <700 μs (typical) |
NOTES
1. Full power source operation regardless of load to 30 °C ambient. Above 30 °C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
2. 10 A range accessible only in pulse mode.
3. High Capacitance Mode accuracy is applicable at 23 °C ±5 °C only.
4. Full power source operation regardless of load to 30 °C ambient. Above 30 °C and/or power sink operation, refer to “Operating Boundaries” in the Series 2600B Reference Manual for additional power derating information.
5. For sink mode operation (quadrants II and IV), add 10% of compliance range and ±0.02% of limit setting to corresponding voltage source specification. For 200 mV range add an additional 120 mV of uncertainty |
| DC Floating voltage |
Output can be floated up to ±250 VDC from chassis ground |
| Remote Sense Operating Range |
Maximum voltage between HI and SENSE HI = 3V .
Maximum voltage between LO and SENSE LO = 3V. |
| Voltage output headroom |
200 V Range |
Max. output voltage = 202.3 V – total voltage drop across source leads (maximum 1 Ω per source lead). |
| 20 V Range |
Max. output voltage = 23.3 V – total voltage drop across source leads (maximum 1 Ω per source lead) |
| Over Temperature Protection |
Internally sensed temperature overload puts unit in standby mode. |
| Voltage Source Range Change Overshoot |
<300 mV + 0.1% of larger range (typical). Overshoot into a 200 kΩ load, 20 MHz BW. |
| Current Source Range Change Overshoot |
<5% of larger range + 300 mV/Rload (typical with source settling set to SETTLE_SMOOTH_100NA). See Current Source Output Settling Time for additional test conditions |
Notes
1. Add 50 μV to source accuracy specifications per volt of HI lead drop |
| Voltage Measurement Accuracy 1, 2 |
| 200 mV |
100 nV |
>1014 Ω |
0.015% + 225 µV |
| 2 V |
1 µV |
>1014 Ω |
0.02% + 350 µV |
| 20 V |
10 µV |
>1014 Ω |
0.015% + 5 mV |
| 200 V |
100 µV |
>1014 Ω |
0.015% + 50 mV |
| Temperature Coefficient (0°–18 °C and 28°–50 °C) |
±(0.15 × accuracy specification)/°C. Applicable for normal mode only. Not applicable for high capacitance mode |
| Current Measurement Accuracy 2 |
| *100 pA 7, 8 |
0.1 fA |
<1 mV |
0.15% + 120 fA |
| 1 nA 7, 9 |
1 fA |
<1 mV |
0.15% + 240 fA |
| 10 nA |
10 fA |
<1 mV |
0.15% + 3 pA |
| 100 nA |
100 fA |
<1 mV |
0.06% + 40 pA |
| 1 µA |
1 pA |
<1 mV |
0.025% + 400 pA |
| 10 µA |
10 pA |
<1 mV |
0.025% + 1.5 nA |
| 100 µA |
100 pA |
<1 mV |
0.02% + 25 nA |
| 1 mA |
1 nA |
<1 mV |
0.02% + 200 nA |
| 10 mA |
10 nA |
<1 mV |
0.02% + 2.5 µA |
| 100 mA |
100 nA |
<1 mV |
0.02% + 20 µA |
| 1 A |
1 µA |
<1 mV |
0.03% + 1.5 mA |
| 1.5 A |
1 µA |
<1 mV |
0.05% + 3.5 mA |
| 10 A 10 |
10 µA |
<1 mV |
0.4% + 25 mA |
| *100 pA range not available on Model 2634B |
| Current Measure Settling Time (time for measurement to settle after a Vstep) 11 |
Time required to reach within 0.1% of final value after source level command is processed on a fixed range. Values for Vout = 2 V unless noted. |
| Current Range |
1 mA |
| Settling Time |
<100 μs (typical). |
| Temperature Coefficient (0°–18 °C and 28°–50 °C) |
±(0.15 × accuracy specification/°C. Applicable for normal mode only. Not applicable for high capacitance mode |
NOTES
1. Add 50 µV to source accuracy specifications per volt of HI lead drop.
2. Derate accuracy specifications for NPLC setting <1 by increasing error term. Add appropriate % of range term using table
3. Applies when in single channel display mode.
4. High Capacitance Mode accuracy is applicable for 23 °C ±5 °C only.
5. Applies when in single channel display mode.
6. Four-wire remote sense only with current meter mode selected. Voltage measure set to 200 mV or 2 V range only.
7. 10-NPLC, 11-Point Median Filter, <200 V range, measurements made within 1 hour after zeroing. 23 °C ± 1 °C
8. Under default specification conditions: ±(0.15% + 750 fA).
9. Under default specification conditions: ±(0.15% + 1 pA).
10. 10 A range accessible only in pulse mode.
11. Delay factor set to 1. Compliance equal to 100 mA.
12. High Capacitance Mode accuracy is applicable for 23 °C ±5 °C only. |